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"Quantitative assessment of subsurface damage depth in silicon wafers based ..."
J. M. Zhang, J. G. Sun (2005)
- J. M. Zhang, J. G. Sun:
Quantitative assessment of subsurface damage depth in silicon wafers based on optical transmission properties. Int. J. Manuf. Technol. Manag. 7(5/6): 540-552 (2005)
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