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"Principle and applications of MEMS: a review."

N. P. Mahalik (2008)

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DOI: 10.1504/IJMTM.2008.016780

access: closed

type: Journal Article

metadata version: 2020-06-04

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N. P. Mahalik:
Principle and applications of MEMS: a review. Int. J. Manuf. Technol. Manag. 13(2/3/4): 324-343 (2008)

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