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"Micromachining of silicon with excimer laser in air and water medium."

Alok Kumar Das, Partha Saha (2010)

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DOI: 10.1504/IJMTM.2010.034285

access: closed

type: Journal Article

metadata version: 2020-06-04

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Alok Kumar Das, Partha Saha:
Micromachining of silicon with excimer laser in air and water medium. Int. J. Manuf. Technol. Manag. 21(1/2): 42-53 (2010)

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