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"Design and simulation of a nano-scale micro positioning stage."

Xiaohui Xie, Ruxu Du, Qiang Sun (2009)

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DOI: 10.1504/IJMIC.2009.027019

access: closed

type: Journal Article

metadata version: 2020-09-17

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Xiaohui Xie, Ruxu Du, Qiang Sun:
Design and simulation of a nano-scale micro positioning stage. Int. J. Model. Identif. Control. 7(1): 15-19 (2009)

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