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"Investigations of silicon wafer grinding using finite element analysis."

J. H. Liu, Z. J. Pei, G. R. Fisher (2007)

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DOI: 10.1504/IJCAT.2007.015243

access: closed

type: Journal Article

metadata version: 2020-09-17

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J. H. Liu, Z. J. Pei, G. R. Fisher:
Investigations of silicon wafer grinding using finite element analysis. Int. J. Comput. Appl. Technol. 29(2/3/4): 102-107 (2007)

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