"Strain and stress analysis of the oxide film surface in the chemical ..."

Yeou-Yih Lin, Ship-Peng Lo, Cheng-Yung Chen (2006)

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DOI: 10.1504/IJCAT.2006.010768

access: closed

type: Journal Article

metadata version: 2020-09-17

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Yeou-Yih Lin, Ship-Peng Lo, Cheng-Yung Chen:
Strain and stress analysis of the oxide film surface in the chemical mechanical polishing process. Int. J. Comput. Appl. Technol. 26(4): 233-241 (2006)

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