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"Polishing Characteristics and Mechanism of Polishing Glass Substrate Using ..."

Michio Uneda, Nodoka Yamada, Yoshihiro Tawara (2022)

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DOI: 10.20965/ijat.2022.p0052

access: closed

type: Journal Article

metadata version: 2022-01-14

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  - https://dblp.org/rec/journals/ijat/UnedaYT22
Michio Uneda, Nodoka Yamada, Yoshihiro Tawara:
Polishing Characteristics and Mechanism of Polishing Glass Substrate Using Suede Pad with Fine Micrometer-Sized Pores. Int. J. Autom. Technol. 16(1): 52-59 (2022)

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