"Investigation into Chemical Mechanical Polishing Mechanism of ..."

Michio Uneda et al. (2015)

> Home

Details and statistics

DOI: 10.20965/IJAT.2015.P0573

access: closed

type: Journal Article

metadata version: 2023-09-30

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/ijat/UnedaTKAI15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/ijat/UnedaTKAI15
Michio Uneda, Keiichi Takano, Koji Koyama, Hideo Aida, Ken-Ichi Ishikawa:
Investigation into Chemical Mechanical Polishing Mechanism of Hard-to-Process Materials Using a Commercially Available Single-Sided Polisher. Int. J. Autom. Technol. 9(5): 573-579 (2015)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.