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"Verification of the Effectiveness of UV-Polishing for 4H-SiC Wafer Using ..."
Takeshi Tanaka, Masaru Takizawa, Akihiro Hata (2018)
- Takeshi Tanaka, Masaru Takizawa, Akihiro Hata:
Verification of the Effectiveness of UV-Polishing for 4H-SiC Wafer Using Photocatalyst and Cathilon. Int. J. Autom. Technol. 12(2): 160-169 (2018)
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