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"Sub-Nanometer Resolution Positioning Device Driven by New Type of Linear ..."

Toshiharu Tanaka et al. (2011)

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DOI: 10.20965/IJAT.2011.P0832

access: closed

type: Journal Article

metadata version: 2020-07-09

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Toshiharu Tanaka, Jiro Otsuka, Ikuro Masuda, Yasuaki Aoyama, Asuka Inagaki:
Sub-Nanometer Resolution Positioning Device Driven by New Type of Linear Motor with Linear Ball Guideways - Considering Time Lag of Electric Control System -. Int. J. Autom. Technol. 5(6): 832-841 (2011)

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