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"Basic Properties of Fixed Abrasive Polishing by Alumina Abrasive Grain for ..."

Ryunosuke Sato (2014)

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DOI: 10.20965/IJAT.2014.P0592

access: closed

type: Journal Article

metadata version: 2020-07-09

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Ryunosuke Sato:
Basic Properties of Fixed Abrasive Polishing by Alumina Abrasive Grain for Si Wafer - Effects of Actual Contact Area and Grain Size -. Int. J. Autom. Technol. 8(4): 592-597 (2014)

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