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"Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation ..."
Lue Quan et al. (2022)
- Lue Quan
, Yuki Shimizu
, Ryo Sato
, Dong Wook Shin, Hiraku Matsukuma, Andreas Archenti, Wei Gao
:
Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction. Int. J. Autom. Technol. 16(5): 572-581 (2022)
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