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"Fabrication of High Aspect Ratio Silicon Nanostructure with Sphere ..."

Nobuyuki Moronuki, Nguyen Phan, Norito Keyaki (2016)

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DOI: 10.20965/IJAT.2016.P0971

access: closed

type: Journal Article

metadata version: 2020-10-26

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  - https://dblp.org/rec/journals/ijat/MoronukiPK16
Nobuyuki Moronuki, Nguyen Phan, Norito Keyaki:
Fabrication of High Aspect Ratio Silicon Nanostructure with Sphere Lithography and Metal-Assisted Chemical Etching and its Wettability. Int. J. Autom. Technol. 10(6): 971-976 (2016)

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