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"A Uniform Pressure Apparatus for Micro/Nanoimprint Lithography Equipment."

Jian-Shian Lin et al. (2009)

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DOI: 10.20965/IJAT.2009.P0084

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - https://dblp.org/rec/journals/ijat/LinLTWT09
Jian-Shian Lin, Chieh-Lung Lai, Ya-Chun Tu, Cheng-Hua Wu, Yoshimi Takeuchi:
A Uniform Pressure Apparatus for Micro/Nanoimprint Lithography Equipment. Int. J. Autom. Technol. 3(1): 84-88 (2009)

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