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"Investigation on Slurry Flow and Temperature in Polishing Process of ..."

Panart Khajornrungruang et al. (2011)

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DOI: 10.20965/IJAT.2011.P0195

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - https://dblp.org/rec/journals/ijat/Khajornrungruang11
Panart Khajornrungruang, Nagisa Wada, Keiichi Kimura, Ryuji Yui, Keisuke Suzuki:
Investigation on Slurry Flow and Temperature in Polishing Process of Quartz Glass Substrate. Int. J. Autom. Technol. 5(2): 195-200 (2011)

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