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"Control-oriented plasma modeling and controller design for reactive ..."

Christian Woelfel et al. (2021)

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DOI: 10.1016/J.IFACSC.2021.100142

access: closed

type: Journal Article

metadata version: 2021-07-13

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Christian Woelfel, Moritz Oberberg, Birk Berger, Dennis Engel, Ralf Peter Brinkmann, Julian Schulze, Peter Awakowicz, Jan Lunze:
Control-oriented plasma modeling and controller design for reactive sputtering. IFAC J. Syst. Control. 16: 100142 (2021)

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