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"A study on flare minimisation in EUV lithography by post-layout ..."

Sudipta Paul, Pritha Banerjee, Susmita Sur-Kolay (2021)

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DOI: 10.1049/CDS2.12028

access: open

type: Journal Article

metadata version: 2023-09-02

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  dblp key:
  - journals/iet-cds/0001BS21
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  - https://dblp.org/rec/journals/iet-cds/0001BS21
Sudipta Paul, Pritha Banerjee, Susmita Sur-Kolay:
A study on flare minimisation in EUV lithography by post-layout re-allocation of wire segments. IET Circuits Devices Syst. 15(4): 310-329 (2021)

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