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"The Evaluation of the Interface Properties of PdEr-Silicide on Si(100) ..."

Rengie Mark D. Mailig, Min Gee Kim, Shun'ichiro Ohmi (2020)

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DOI: 10.1587/TRANSELE.2019FUP0006

access: closed

type: Journal Article

metadata version: 2021-01-18

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  dblp key:
  - journals/ieicetc/MailigKO20
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  persistent URL:
  - https://dblp.org/rec/journals/ieicetc/MailigKO20
Rengie Mark D. Mailig, Min Gee Kim, Shun'ichiro Ohmi:
The Evaluation of the Interface Properties of PdEr-Silicide on Si(100) Formed with TiN Encapsulating Layer and Dopant Segregation Process. IEICE Trans. Electron. 103-C(6): 286-292 (2020)

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