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"Character-Size Optimization for Reducing the Number of EB Shots of MCC ..."

Makoto Sugihara (2010)

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DOI: 10.1587/TRANSELE.E93.C.631

access: closed

type: Journal Article

metadata version: 2020-04-11

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Makoto Sugihara:
Character-Size Optimization for Reducing the Number of EB Shots of MCC Lithographic Systems. IEICE Trans. Electron. 93-C(5): 631-639 (2010)

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