"Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical ..."

Takayuki Shimazu, Makoto Katayama, Yoshitada Isono (2005)

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DOI: 10.1093/IETELE/E88-C.5.1020

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type: Journal Article

metadata version: 2023-09-30

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Takayuki Shimazu, Makoto Katayama, Yoshitada Isono:
Fatigue Characteristics of the Si Moveable Comb Inserted into MEMS Optical Devices. IEICE Trans. Electron. 88-C(5): 1020-1024 (2005)

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