"Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical ..."

Shinji Matsui, Reo Kometani (2007)

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DOI: 10.1093/IETELE/E90-C.1.25

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type: Journal Article

metadata version: 2020-04-11

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Shinji Matsui, Reo Kometani:
Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications. IEICE Trans. Electron. 90-C(1): 25-35 (2007)

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