"Improvement of Endurance Characteristics for Al-Gate Hf-Based MONOS ..."

Sohya Kudoh, Shun'ichiro Ohmi (2018)

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DOI: 10.1587/TRANSELE.E101.C.328

access: closed

type: Journal Article

metadata version: 2020-04-11

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Sohya Kudoh, Shun'ichiro Ohmi:
Improvement of Endurance Characteristics for Al-Gate Hf-Based MONOS Structures on Atomically Flat Si(100) Surface Realized by Annealing in Ar/H₂ Ambient. IEICE Trans. Electron. 101-C(5): 328-333 (2018)

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