"A Novel Selected Area Laser Assisted (SALA) System for Crystallization and ..."

Ryoichi Ishihara et al. (2006)

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DOI: 10.1093/IETELE/E89-C.10.1377

access: closed

type: Journal Article

metadata version: 2025-03-03

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Ryoichi Ishihara, Arie Glazer, Yoel Raab, Peter Rusian, Mannie Dorfan, Benzi Lavi, Ilya Leizerson, Albert Kishinevsky, Yvonne Van Andel, Xin Cao, Wim Metselaar, Kees Beenakker, Sara Stolyarova, Yael Nemirovsky:
A Novel Selected Area Laser Assisted (SALA) System for Crystallization and Doping Processes in Low-Temperature Poly-Si Thin-Film Transistors. IEICE Trans. Electron. 89-C(10): 1377-1382 (2006)

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