"Plasma-Induced Fluorine Damage in P-HEMT Caused by C2F6/CHF3 RIE Plasma."

Hiroyuki Uchiyama, Takafumi Taniguchi (2004)

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DOI: 10.1587/ELEX.1.46

access: open

type: Journal Article

metadata version: 2022-06-10

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Hiroyuki Uchiyama, Takafumi Taniguchi:
Plasma-Induced Fluorine Damage in P-HEMT Caused by C2F6/CHF3 RIE Plasma. IEICE Electron. Express 1(2): 46-50 (2004)

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