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ORCID"A high fill-factor comb-driven XY-stage with topological layer switch ..."
Kazuhiro Takahashi et al. (2006)
- Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, Hiroshi Toshiyoshi:
A high fill-factor comb-driven XY-stage with topological layer switch architecture. IEICE Electron. Express 3(9): 197-202 (2006)
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