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"Evaluation of the phase error in Si-wire arrayed-waveguide gratings ..."
Kyosuke Muramatsu et al. (2015)
- Kyosuke Muramatsu, Hideaki Asakura, Keijiro Suzuki
, Ken Tanizawa, Munehiro Toyama, Minoru Ohtsuka, Nobuyuki Yokoyama, Kazuyuki Matsumaro, Miyoshi Seki, Keiji Koshino, Kazuhiro Ikeda
, Shu Namiki
, Hitoshi Kawashima, Hiroyuki Tsuda:
Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography. IEICE Electron. Express 12(7): 20150019 (2015)
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