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ORCID"An equivalent-circuit model for MEMS electrostatic actuator using ..."
Makoto Mita, Hiroshi Toshiyoshi (2009)
- Makoto Mita, Hiroshi Toshiyoshi:
An equivalent-circuit model for MEMS electrostatic actuator using open-source software Qucs. IEICE Electron. Express 6(5): 256-263 (2009)
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