"An equivalent-circuit model for MEMS electrostatic actuator using ..."

Makoto Mita, Hiroshi Toshiyoshi (2009)

> Home

Details and statistics

DOI: 10.1587/ELEX.6.256

access: open

type: Journal Article

metadata version: 2023-08-28

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/ieiceee/MitaT09
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/ieiceee/MitaT09
Makoto Mita, Hiroshi Toshiyoshi:
An equivalent-circuit model for MEMS electrostatic actuator using open-source software Qucs. IEICE Electron. Express 6(5): 256-263 (2009)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.