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ORCID"Development of high-yield fabrication technique for MEMS-PhC devices."
Akio Higo et al. (2006)
- Akio Higo, Satoshi Iwamoto
, Satomi Ishida, Yasuhiko Arakawa, Masatoshi Tokushima, Akiko Gomyo, Hirohito Yamada, Hiroyuki Fujita, Hiroshi Toshiyoshi:
Development of high-yield fabrication technique for MEMS-PhC devices. IEICE Electron. Express 3(3): 39-43 (2006)
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