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"Scheduling dual-arm cluster tools with multiple wafer types and residency ..."

Jipeng Wang et al. (2020)

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DOI: 10.1109/JAS.2020.1003150

access: closed

type: Journal Article

metadata version: 2021-04-09

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  - journals/ieeejas/WangHPZL20
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  - https://dblp.org/rec/journals/ieeejas/WangHPZL20
Jipeng Wang, Hesuan Hu, Chunrong Pan, Yuan Zhou, Liang Li:
Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints. IEEE CAA J. Autom. Sinica 7(3): 776-789 (2020)

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