"Knowledge acquisition from batch semiconductor manufacturing data."

María Dolores del Castillo Sobrino, Luis J. Barrios (1999)

Details and statistics

DOI: 10.1016/S1088-467X(99)00030-X

access: closed

type: Journal Article

metadata version: 2017-05-26

a service of  Schloss Dagstuhl - Leibniz Center for Informatics