"The chemistry of additives in damascene copper plating."

Phillipe M. Vereecken et al. (2005)

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type: Journal Article

metadata version: 2021-07-06

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Phillipe M. Vereecken, Robert A. Binstead, Hariklia Deligianni, Panayotis C. Andricacos:
The chemistry of additives in damascene copper plating. IBM J. Res. Dev. 49(1): 3-18 (2005)

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