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"Process technology for IBM 14-nm processor designs featuring ..."

Scott R. Stiffler et al. (2018)

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DOI: 10.1147/JRD.2018.2800518

access: closed

type: Journal Article

metadata version: 2022-04-20

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Scott R. Stiffler, Ravikumar Ramachandran, W. Kirklen Henson, Noah Zamdmer, Kevin McStay, Giuseppe La Rosa, Kevin M. Boyd, Sungjae Lee, Claude Ortolland, Paul C. Parries:
Process technology for IBM 14-nm processor designs featuring silicon-on-insulator FinFETs. IBM J. Res. Dev. 62(2/3): 11:1-11:7 (2018)

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