"Reliability of SiO2 Gate Dielectric with Semi-Recessed Oxide Isolation."

D. W. Ormond, J. R. Gardiner (1980)

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DOI: 10.1147/RD.243.0353

access: closed

type: Journal Article

metadata version: 2020-05-12

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D. W. Ormond, J. R. Gardiner:
Reliability of SiO2 Gate Dielectric with Semi-Recessed Oxide Isolation. IBM J. Res. Dev. 24(3): 353-361 (1980)

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