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"Surface science issues in plasma etching."
Gottlieb S. Oehrlein et al. (1999)
- Gottlieb S. Oehrlein
, Marcus F. Doemling, Bernd E. E. Kastenmeier, Peter J. Matsuo, Neal R. Rueger, Marc Schaepkens, Theodorus E. F. M. Standaert:
Surface science issues in plasma etching. IBM J. Res. Dev. 43(1): 181-198 (1999)
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