"Superconformal film growth: Mechanism and quantification."

Thomas P. Moffat et al. (2005)

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type: Journal Article

metadata version: 2021-07-06

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Thomas P. Moffat, Daniel Wheeler, Monica D. Edelstein, Daniel Josell:
Superconformal film growth: Mechanism and quantification. IBM J. Res. Dev. 49(1): 19-36 (2005)

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