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"Printing meets lithography: Soft approaches to high-resolution patterning."

Bruno Michel et al. (2001)

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DOI: 10.1147/RD.455.0697

access: closed

type: Journal Article

metadata version: 2020-03-13

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  - journals/ibmrd/MichelBBDGJKRRSSSW01
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  - https://dblp.org/rec/journals/ibmrd/MichelBBDGJKRRSSSW01
Bruno Michel, André Bernard, Alexander Bietsch, Emmanuel Delamarche, Matthias Geissler, David Juncker, Hannes Kind, Jean-Philippe Renault, Hugo E. Rothuizen, Heinz Schmid, Patrick Schmidt-Winkel, Richard Stutz, Heiko Wolf:
Printing meets lithography: Soft approaches to high-resolution patterning. IBM J. Res. Dev. 45(5): 697-719 (2001)

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