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"Electron-Beam Resists for Lift-Off Processing with Potential Application ..."

J. H. Magerlein, D. J. Webb (1980)

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DOI: 10.1147/RD.245.0554

access: closed

type: Journal Article

metadata version: 2020-05-12

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J. H. Magerlein, D. J. Webb:
Electron-Beam Resists for Lift-Off Processing with Potential Application to Josephson Integrated Circuits. IBM J. Res. Dev. 24(5): 554-562 (1980)

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