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"Computer Simulation of Electron-Beam Resist Profiles."

D. F. Kyser, R. Pyle (1980)

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DOI: 10.1147/RD.244.0426

access: closed

type: Journal Article

metadata version: 2020-05-12

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D. F. Kyser, R. Pyle:
Computer Simulation of Electron-Beam Resist Profiles. IBM J. Res. Dev. 24(4): 426-437 (1980)

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