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"Plasma processing in the fabrication of amorphous silicon ..."

Yue Kuo, Kenji Okajima, Masatomo Takeichi (1999)

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DOI: 10.1147/RD.431.0073

access: closed

type: Journal Article

metadata version: 2020-03-13

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Yue Kuo, Kenji Okajima, Masatomo Takeichi:
Plasma processing in the fabrication of amorphous silicon thin-film-transistor arrays. IBM J. Res. Dev. 43(1): 73-88 (1999)

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