"Photoelectrochemical etching of semiconductors."

Paul A. Kohl (1998)

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DOI: 10.1147/RD.425.0629

access: closed

type: Journal Article

metadata version: 2020-03-13

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Paul A. Kohl:
Photoelectrochemical etching of semiconductors. IBM J. Res. Dev. 42(5): 629-638 (1998)

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