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"Analysis of the Impurity Atom Distribution Near the Diffusion Mask for a ..."

David P. Kennedy, Redmond R. O'Brien (1965)

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DOI: 10.1147/RD.93.0179

access: closed

type: Journal Article

metadata version: 2020-03-13

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David P. Kennedy, Redmond R. O'Brien:
Analysis of the Impurity Atom Distribution Near the Diffusion Mask for a Planar p-n Junction. IBM J. Res. Dev. 9(3): 179-186 (1965)

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