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"Cost-effective cleaning and high-quality thin gate oxides."

Marc M. Heyns et al. (1999)

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DOI: 10.1147/RD.433.0339

access: closed

type: Journal Article

metadata version: 2020-03-13

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  dblp key:
  - journals/ibmrd/HeynsBCGDGKKLMMMNSTVVW99
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  persistent URL:
  - https://dblp.org/rec/journals/ibmrd/HeynsBCGDGKKLMMMNSTVVW99
Marc M. Heyns, Twan Bearda, Ingrid Cornelissen, Stefan De Gendt, Robin Degraeve, Guido Groeseneken, Conny Kenens, D. Martin Knotter, Lee M. Loewenstein, Paul W. Mertens, Sofie Mertens, Marc Meuris, Tanya Nigam, Marc Schaekers, Ivo Teerlinck, Wilfried Vandervorst, Rita Vos, Klaus Wolke:
Cost-effective cleaning and high-quality thin gate oxides. IBM J. Res. Dev. 43(3): 339-350 (1999)

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