"A four-level VLSI bipolar metallization design with chemical-mechanical ..."

William L. Guthrie et al. (1992)

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DOI: 10.1147/RD.365.0845

access: closed

type: Journal Article

metadata version: 2020-03-13

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William L. Guthrie, William J. Patrick, Ernest Levine, Harris C. Jones, Ebrahim A. Mehter, Thomas F. Houghton, George T. Chiu, Michael A. Fury:
A four-level VLSI bipolar metallization design with chemical-mechanical planarization. IBM J. Res. Dev. 36(5): 845-858 (1992)

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