"Electron beam lithography tool for manufacture of X-ray masks."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Timothy R. Groves et al. (1993)

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DOI: 10.1147/RD.373.0411

access: closed

type: Journal Article

metadata version: 2020-03-13

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Timothy R. Groves, John G. Hartley, Hans C. Pfeiffer, Denise Puisto, Donald K. Bailey:
Electron beam lithography tool for manufacture of X-ray masks. IBM J. Res. Dev. 37(3): 411-420 (1993)

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