"Proximity Correction Enhancements for 1-µm Dense Circuits."

W. D. Grobman, A. J. Speth, T. H. P. Chang (1980)

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DOI: 10.1147/RD.245.0537

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type: Journal Article

metadata version: 2020-05-12

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W. D. Grobman, A. J. Speth, T. H. P. Chang:
Proximity Correction Enhancements for 1-µm Dense Circuits. IBM J. Res. Dev. 24(5): 537-544 (1980)

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