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"Performance-optimized gate-first 22-nm SOI technology with embedded DRAM."

Gregory Freeman et al. (2015)

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DOI: 10.1147/JRD.2014.2380252

access: closed

type: Journal Article

metadata version: 2023-02-03

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Gregory Freeman, Paul Chang, E. R. Engbrecht, K. J. Giewont, David F. Hilscher, M. Lagus, Timothy J. McArdle, B. Morgenfeld, Shreesh Narasimha, James P. Norum, K. A. Nummy, Paul C. Parries, G. Wang, Jonathan K. Winslow, Paul D. Agnello, Rajeev Malik:
Performance-optimized gate-first 22-nm SOI technology with embedded DRAM. IBM J. Res. Dev. 59(1) (2015)

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