"Plasma processing damage in etching and deposition."

Stephen J. Fonash (1999)

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DOI: 10.1147/RD.431.0103

access: closed

type: Journal Article

metadata version: 2020-03-13

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Stephen J. Fonash:
Plasma processing damage in etching and deposition. IBM J. Res. Dev. 43(1): 103-108 (1999)

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