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"Stress-induced dislocations in silicon integrated circuits."

Paul M. Fahey et al. (1992)

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DOI: 10.1147/RD.362.0158

access: closed

type: Journal Article

metadata version: 2020-03-13

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  - https://dblp.org/rec/journals/ibmrd/FaheyMSMMS92
Paul M. Fahey, Siegfried R. Mader, Scott R. Stiffler, Rick L. Mohler, J. Daniel Mis, James A. Slinkman:
Stress-induced dislocations in silicon integrated circuits. IBM J. Res. Dev. 36(2): 158-182 (1992)

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