"Laser release process to obtain freestanding multilayer metal-polyimide ..."

Fuad E. Doany, Chandrasekhar Narayanaswami (1997)

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DOI: 10.1147/RD.411.0151

access: closed

type: Journal Article

metadata version: 2020-03-13

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Fuad E. Doany, Chandrasekhar Narayanaswami:
Laser release process to obtain freestanding multilayer metal-polyimide circuits. IBM J. Res. Dev. 41(1&2): 151-158 (1997)

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