"Medium-energy ion scattering for analysis of microelectronic materials."

Matthew Copel (2000)

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DOI: 10.1147/RD.444.0571

access: closed

type: Journal Article

metadata version: 2020-03-13

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Matthew Copel:
Medium-energy ion scattering for analysis of microelectronic materials. IBM J. Res. Dev. 44(4): 571-582 (2000)

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